Product Summary
Based on our extensive experience in designing mass flow solutions for medical and industrial equipment, Sensirion's mass flow controllers offer a wide dynamic range as well as fast and accurate gas flow control.
The sensor element and signal processing circuit are integrated on a single CMOS chip and the system is patented as CMOSens® technology. When measuring flow using the thermal measuring principle, the flow can be efficiently controlled via an analog control circuit. This patented technology gives Sensirion mass flow controllers excellent performance.
SFC series product lineup
SFC5300
The mass flow controller "SFC5300" is a product that can be used for a long time. The SFC5300 can measure and control mass flow over a wide dynamic range with compact size and excellent accuracy. The main body of "SFC5300" is made of metal. A down mount connection is available for the fluid connection of the mass flow controller "SFC5300". Two digital interfaces are provided for the interface.
- Product features
- High accuracy at lowest flow rates (< 1 sccm)
- ・Excellent long-term stability and reliability
- ・Wide dynamic range (turndown ratio 1000:1)
- ・Multi gas function
- ・Attractive price/performance ratio with CMOSens® technology
- ・Compact size
SFC5400
The mass flow controller "SFC5400" is a product that can be used for a long time. The SFC5400 can measure and control mass flow over a wide dynamic range with compact size and excellent accuracy. The main body of "SFC5400" is made of metal. In addition, various interfaces and various fluid connections are possible, and maximum flow rates from 50sccm to 200slm can be measured.
- Product features
- ・Ultra-fast gas flow control (settling time < 100 ms)
- High accuracy at lowest flow rates (< 1 sccm)
- ・Excellent long-term stability and reliability
- ・Wide dynamic range (turndown ratio 1000:1)
- ・Multi gas function
- ・Attractive price/performance ratio with CMOSens® technology
- ・Digital and analog interfaces
- ・Customizable upon request