Product Summary

With extensive experience in designing mass flow solutions for medical and industrial equipment, Sensirion's mass flow meters offer a wide dynamic range, high speed, high accuracy, efficient gas flow measurement, high reliability, and long-term stability. To do.

The sensing part of all mass flow meters is a calorimetric microsensor based on MEMS, which measures the gas flow according to the principle of thermal measurement.
The sensor element and signal processing circuit are integrated on a single CMOS chip and the system is patented as CMOSens® technology.

この特許技術によりセンシリオンのマスフローメーターは優れた性能と魅力的なコストを実現にしました。

Sensirion offers mass flow meters for various applications.

Product lineup

• SFM3000
• ・Low pressure drop: < 6mbar @ 200sml
• ・Flow range: ±200 slm (bidirectional)
• ・Accuracy: 1.5% against measured value
• ・Ultra-fast response
• ・Digital calibration, temperature compensation
• ・Digital interface (I²C)

• SFM3100
• ・Flow range: -24 ~ +240 slm
• ・Measurement accuracy: 5% (standard)
• ・Ultra-fast response
• ・Low pressure drop: < 16mbar @ 200slm (typical)
• ・Backflow and error detection
• ・Analog output
• ・100% calibration and temperature compensation

• SFM3200
• ・Flow range: up to 250 slm (bi-directional)
• ・Excellent performance at low flow rate
• ・Low pressure loss
• ・High-speed signal processing time
• Internally linearized and temperature compensated output signal

• SFM3300
• ・Automatic steam sterilization and cleaning possible
• ・Flow range: ±250 slm (bidirectional)
• Small dead space: < 10 ml
• ・Available for various inlet conditions
• ・Fast signal processing time and excellent robustness
• ・Respiratory system standard size inlet cone
• ・Detachable signal connector mechanism
• ・Disposable version available

• SFM3400
• ・For premature babies and pediatric applications
• ・Reusable version/disposable version
• ・Flow range: ±33 slm (bidirectional)
• ・Fully calibrated, no need to recalibrate
• ・High-speed sampling time (0.5 ms)
• - < 1 ml dead space
• ・Medical cone for pneumatic connection to standard breathing circuit

• SFM4100
• ・Measured flow rate: 0 ~ 20 l/min
• ・Wide dynamic range (1:500)
• ・Digital interface (I²C)
• ・Complete calibration and temperature compensation
• ・Multi gas setting option

• SFM4200
• ・Flow rate 0-160 slm
• ・Excellent pressure resistance (operable up to 8 bar)
• ・High-speed signal processing of 0.5 ms
• ・Digital I2C 2-wire interface
• ・Measurement with linearized temperature compensation

• SFM4300
• ・High accuracy and high sensitivity (especially for small flow rates)
• ・Flow rate range: 0 to 20 slm
• - Very high pressure resistance (up to 6 bar)
• ・Multiple gas options available
• ・Fully calibrated and temperature compensated
• ・Digital I²C interface
• ・Equipment connection: Downmount, Legris, O-ring

• SFM5400
• High accuracy at small flow rates (< 1 sccm)
• ・Excellent precision/repeatability
• ・Wide dynamic range
• ・Support for various gas types and gas recognition
• ・Digital ⁽I2C) and analog interface
• ・Joint option available

Evaluation kit for mass flow meters

Evaluation kit configuration diagram

Sensor Bridge

With the SEK-SensorBridge you can connect a suitable Sensirion sensor to your computer. This tool works closely with the SEK-ControlCenter software. The SEK-SensorBridge has two ports where sensors can be connected. Multiple sensors can be connected to each port if the sensors have different I2C addresses.

SEK-SFMxxxx

・Mass flow meter evaluation kit

SFM3000

・Mass flow meter evaluation kit

SFM3200

・Mass flow meter evaluation kit

SFM4100

・Mass flow meter evaluation kit

SFM4200

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